Surface and thickness measurement in the Targetlab of GSI

Abstract

For characterization of targets and foils prepared at the target laboratory as well as for characterization of e.g. degrader or windows of internal customers, different analytical devices are available. Besides a lot of standard equipment, the target laboratory of GSI holds a 3D-measurement system (MicroProf®) equipped with optical sensors for measuring surface parameters as well as total thickness variations contact-free. In the paper the measuring principle including the possibilities and features of the MicroProf®-system are explained and some different applications are shown.