Chemical Engineering Transactions (Aug 2010)

Model Predictive Control of a Cvd Reactor for Production of Polysilicon Rods

  • L. Viganò,
  • M. Vallerio,
  • F. Manenti,
  • N.M.N. Lima,
  • L. Zuñiga Liñan,
  • G. Manenti

DOI
https://doi.org/10.3303/CET1021088
Journal volume & issue
Vol. 21

Abstract

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