Method of stationary interference patterns reading and processing

Abstract

Optoelectronic reading system allows to obtain and process the interference pattern image in the Kosters interferometer in the real-time mode and has sufficient resolution. Rms deviation of measuring result is 0,001 mm. Total time spent on measuring and analysing the results, was reduced from two hours to 30 minutes.

Keywords

• interference patterns
• CCD
• readout
• video signal processing
• phase difference
• wavelength
• resolution
• Kosters interferometer
• verification