Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range

Ting-Wei Liu; Yao-Chuan Tsai; Yu-Ching Lin; Takahito Ono; Shuji Tanaka; Tsung-Tsong Wu

doi:10.1063/1.4902018

AIP Advances (Dec 2014)

Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range

Ting-Wei Liu,
Yao-Chuan Tsai,
Yu-Ching Lin,
Takahito Ono,
Shuji Tanaka,
Tsung-Tsong Wu

Affiliations

Ting-Wei Liu: Inst. of Applied Mechanics, National Taiwan Univ., Taipei, Taiwan
Yao-Chuan Tsai: WPI-AIMR, Tohoku Univ., Sendai, Japan
Yu-Ching Lin: WPI-AIMR, Tohoku Univ., Sendai, Japan
Takahito Ono: Dept. of Mechanical Engineering, Tohoku Univ., Sendai, Japan
Shuji Tanaka: Dept. of Mechanical Engineering, Tohoku Univ., Sendai, Japan
Tsung-Tsong Wu: Inst. of Applied Mechanics, National Taiwan Univ., Taipei, Taiwan

DOI: https://doi.org/10.1063/1.4902018
Journal volume & issue: Vol. 4, no. 12
pp. 124201 – 124201-11

Abstract

Read online

This paper presents a method for designing and fabricating a Love wave resonator utilizing the phononic crystal (PC) as the reflectors. The PCs were formed by depositing 2D, periodically etched silica film on a quartz substrate. We analyzed the PC structure, and within its partial bandgap we designed a one-port resonator that contained a set of inter-digital transducer (IDT) inside the resonant cavity bonded by two PC arrays. With sub-micrometer structures, the resonator was designed to operate at 1.25 GHz. The device was fabricated by employing the microelectromechanical system (MEMS) fabrication technology and the resonant performance was evaluated.

Published in AIP Advances

ISSN: 2158-3226 (Online)
Publisher: AIP Publishing LLC
Country of publisher: United States
LCC subjects: Science: Physics
Website: http://aipadvances.aip.org/

About the journal