A MEMS-Controllable Fresnel Zone Plate for Miniaturized UV Spectrometer

Abstract

This work presents the design and simulation of a MEMS-controllable linear motion Fresnel Zone Plate (FZP). The focal length of an FZP is a function of incident wavelength. This principle can be used for separating wavelengths, enabling a spectrometer application. The FZP of this work is designed on a linearly moving MEMS actuator, enabling wavelength focusing onto a fixed image plane. The FZP is designed with 400 zones, which can focus wavelengths from 150 nm to 410 nm by moving on a distance of 1 mm.

Keywords

• Fresnel Zone Plate
• MEMS FZP
• Lorentz force actuator
• miniaturized spectrometer
• diffractive wavelength selection