RESEARCH on MECHANICAL PROPERTIES OF MEMS COMPONENTS BASED ON anodic alumina

Abstract

Today, using of nanostructured materials in microelectromechanical systems (MEMS) is very perspective. One of such materials is anodic aluminum oxide that has electrical and mechanical properties not worse than other materials that are currently used in manufacturing of MEMS devices. This article presents the results of research in methodology and measurement of Young's modulus of free aluminum oxide films.

Keywords

• anodic aluminum oxide
• nanostructured materials
• young's modulus