ACS Omega (Nov 2018)

In Situ SiO2 Passivation of Epitaxial (100) and (110)InGaAs by Exploiting TaSiOx Atomic Layer Deposition Process

  • Mantu K. Hudait,
  • Michael B. Clavel,
  • Jheng-Sin Liu,
  • Shuvodip Bhattacharya

DOI
https://doi.org/10.1021/acsomega.8b02314
Journal volume & issue
Vol. 3, no. 11
pp. 14567 – 14574

Abstract

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