Photonic Microcantilevers With Interferometric Bragg Grating Interrogation

Abstract

Germanosilicate glass microcantilevers are fabricated featuring an integrated Fabry-Pérot interferometer. Direct UV writing of single-mode planar waveguides and Bragg gratings is combined with physical micromachining, using a precision dicing saw, to realize glass microcantilevers on a silicon platform. The device presented here has a wavelength shift force sensitivity of 330 nm/N, which is calibrated using a surface profilometer measurement and is an order of magnitude better than current state-of-the-art Bragg-grating-based sensors. The device also shows an approximately tenfold increase in amplitude modulation compared with a similar device architecture utilizing a single Gaussian-apodized Bragg grating. By forming the Fabry-Pérot cavity around the point of greatest strain, we reduce the unwanted effects of grating chirp as the cantilever is deflected and relate the performance to a mechanical model that relates cavity phase shift to deflection.

Keywords

• Micro and nano opto-electro-mechanical systems (MOEMS)
• sensors
• waveguide devices