Innovative Designs For Enhancing the Functionality of MEMS-Based Phase Plates through Numerical Simulation and Optimisation

• Kavkani Payam Habibzadeh,
• Grillo Vincenzo,
• Beleggia Marco

Affiliations

Kavkani Payam Habibzadeh

Universitá di Modena e Reggio Emilia

Grillo Vincenzo

CNRNANO - Istituto di Nanoscienze - Centro S3

Beleggia Marco

Universitá di Modena e Reggio Emilia