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Micro and Nano Engineering
(Dec 2024)
From ghost to state-of-the-art process corrections – PEC enabled e-beam nanofabrication
Ulrich Hofmann,
Nezih Ünal,
Jan Klikovits
Affiliations
Ulrich Hofmann
Corresponding author.; GenISys GmbH, Eschenstr. 66, 82024 Taufkirchen, Germany
Nezih Ünal
GenISys GmbH, Eschenstr. 66, 82024 Taufkirchen, Germany
Jan Klikovits
GenISys GmbH, Eschenstr. 66, 82024 Taufkirchen, Germany
Journal volume & issue
Vol. 25
p. 100286
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