Energy-Trapping Characteristics of Lateral Field Excited GdCOB Crystal Bulk Acoustic Wave Devices Based on Stepped Electrodes

Bowei Wu; Pengfei Kang; Tingfeng Ma; Yuming Yao; Ning Gan; Peng Li; Zhenghua Qian; Iren Kuznetsova; Ilya Nedospasov; Wenhui Hu

doi:10.3390/mi14122162

Micromachines (Nov 2023)

Energy-Trapping Characteristics of Lateral Field Excited GdCOB Crystal Bulk Acoustic Wave Devices Based on Stepped Electrodes

Bowei Wu,
Pengfei Kang,
Tingfeng Ma,
Yuming Yao,
Ning Gan,
Peng Li,
Zhenghua Qian,
Iren Kuznetsova,
Ilya Nedospasov,
Wenhui Hu

Affiliations

Bowei Wu: School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211, China
Pengfei Kang: School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211, China
Tingfeng Ma: School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211, China
Yuming Yao: Keli Sensing Technology (Ningbo) Co., Ltd., Ningbo 315033, China
Ning Gan: School of Material Science and Chemical Engineering, Ningbo University, Ningbo 315211, China
Peng Li: The State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
Zhenghua Qian: The State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
Iren Kuznetsova: Kotelnikov Institute of Radio Engineering and Electronics of RAS, 125009 Moscow, Russia
Ilya Nedospasov: Kotelnikov Institute of Radio Engineering and Electronics of RAS, 125009 Moscow, Russia
Wenhui Hu: Keli Sensing Technology (Ningbo) Co., Ltd., Ningbo 315033, China

DOI: https://doi.org/10.3390/mi14122162
Journal volume & issue: Vol. 14, no. 12
p. 2162

Abstract

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In this work, high-frequency forced vibrations of lateral field excitation (LFE) devices with stepped electrodes based on monoclinic crystals GdCOB are modeled, and the influence laws of the device parameters (the step number, size, and thickness of the stepped electrodes) on the energy-trapping effects of the device are revealed. The results show that the step number has a significant effect on the energy-trapping effect of the device: with the increase in the step number, the stronger energy-trapping effect of the device can be obtained; with the increase in the thickness difference of two layers of electrodes, the energy-trapping effect of the device becomes stronger; with the increase in the difference of the electrode radius, the energy-trapping effect of the device is enhanced gradually. The results of this work can provide an important theoretical basis for the design of stepped-electrode LFE resonators and sensors with high-quality factors based on monoclinic crystals.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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