Creation of high resolution pattern by nanoscratching

• Ramiączek-Krasowska Maria,
• Prażmowska Joanna,
• Los Kornelia,
• Stafiniak Andrzej,
• Szyszka Adam,
• Paszkiewicz Regina,
• Orski Wojciech,
• Tarnowski Karol,
• Tłaczała Marek

Affiliations

Ramiączek-Krasowska Maria

Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17 Street, 50-372, Wrocław, Poland

Prażmowska Joanna

Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17 Street, 50-372, Wrocław, Poland

Los Kornelia

Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17 Street, 50-372, Wrocław, Poland

Stafiniak Andrzej

Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17 Street, 50-372, Wrocław, Poland

Szyszka Adam

Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17 Street, 50-372, Wrocław, Poland

Paszkiewicz Regina

Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17 Street, 50-372, Wrocław, Poland

Orski Wojciech

Institute of Physics, Wrocław University of Technology, Wybrzeże Wyspiańskiego 27, 50-370, Wrocław, Poland

Tarnowski Karol

Institute of Physics, Wrocław University of Technology, Wybrzeże Wyspiańskiego 27, 50-370, Wrocław, Poland

Tłaczała Marek

Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17 Street, 50-372, Wrocław, Poland