AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application

Yichen Liu; Lihao Wang; Yongquan Su; Yuyao Zhang; Yang Wang; Zhenyu Wu

doi:10.3390/mi13091550

Micromachines (Sep 2022)

AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application

Yichen Liu,
Lihao Wang,
Yongquan Su,
Yuyao Zhang,
Yang Wang,
Zhenyu Wu

Affiliations

Yichen Liu: State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Lihao Wang: State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Yongquan Su: State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Yuyao Zhang: School of Microelectronics, Shanghai University, Shanghai 200444, China
Yang Wang: State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Zhenyu Wu: State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

DOI: https://doi.org/10.3390/mi13091550
Journal volume & issue: Vol. 13, no. 9
p. 1550

Abstract

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This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a diameter of 1.5 mm possessed adjustable optical tilt angles of up to 22.6° @ 30 V, with a high resonance frequency of about 8.2 kHz, while the 3 mm mirror reached 48.5° @ 41 V. The mirror with the gimbaled structure exhibited an excellent field of view and good mechanical decoupling. Additionally, a significant improvement in mirror scanning performance was observed in a vacuum (4 Pa), proving that the optical field of view was magnified by more than a factor of 10.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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