Polymer/Silica Hybrid Waveguide Thermo-Optic VOA Covering O-Band

Yuexin Yin; Mengke Yao; Yingzhi Ding; Xinru Xu; Yue Li; Yuanda Wu; Daming Zhang

doi:10.3390/mi13040511

Micromachines (Mar 2022)

Polymer/Silica Hybrid Waveguide Thermo-Optic VOA Covering O-Band

Yuexin Yin,
Mengke Yao,
Yingzhi Ding,
Xinru Xu,
Yue Li,
Yuanda Wu,
Daming Zhang

Affiliations

Yuexin Yin: State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
Mengke Yao: State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
Yingzhi Ding: State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
Xinru Xu: State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
Yue Li: State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
Yuanda Wu: College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
Daming Zhang: State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

DOI: https://doi.org/10.3390/mi13040511
Journal volume & issue: Vol. 13, no. 4
p. 511

Abstract

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In this paper, a polymer/silica hybrid waveguide thermo-optic variable optical attenuator (VOA), covering the O-band, is demonstrated. The switch is fabricated by simple and low-cost direct ultraviolet (UV) lithography. The multimode interferences (MMIs) used in the Mach–Zehnder interferometer (MZI)-VOA are well optimized to realize low loss and large bandwidth. The VOA shows an extinction ratio (ER) of 18.64 dB at 1310 nm, with a power consumption of 8.72 mW. The attenuation is larger than 6.99 dB over the O-band. The rise and fall time of the VOA are 184 μs and 180 μs, respectively.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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