A Design Approach to Reducing Stress and Distortion Caused by Adhesive Assembly in Micromachined Deformable Mirrors

Abstract

A common problem in deformable mirror assembly is that the adhesion of actuators to an optical mirror face sheet introduces unwanted topography due to large local stresses generated at the adhesive joint. A new approach to minimizing that effect is described, with inspiration taken from St. Venant’s principle, a fundamental precept in solid mechanics. It is demonstrated that moving the adhesive joint to the end of a slender post extending from the face sheet largely eliminates deformation due to adhesive stresses. A practical implementation of this design innovation is described, using silicon-on-insulator wafers and deep reactive ion etching. Simulation and experiments validate the effectiveness of the approach, reducing stress-induced topography on a test structure by a factor of 50. A prototype electromagnetic DM using this design approach is described, and its actuation is demonstrated. This new design can benefit a wide range of DMs that rely on actuator arrays that are adhesively bonded to a mirror face sheet.

Keywords

• deformable mirror
• micromachines
• electromagnetic actuation
• packaging and assembly
• thin-film stress