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BIO Web of Conferences
(Jan 2024)
Observation of logic states of HfO2-based ferroelectric FETs using STEM-DPC
Nemec Thorgund,
Utess Dirk,
Duenkel Stefan,
Weisheit Martin,
Mulaosmanovic Halid,
Beyer Sven,
Meyer Moritz Andreas
Affiliations
Nemec Thorgund
GlobalFoundries Dresden Module One LLC & Co. KG
Utess Dirk
GlobalFoundries Dresden Module One LLC & Co. KG
Duenkel Stefan
GlobalFoundries Dresden Module One LLC & Co. KG
Weisheit Martin
GlobalFoundries Dresden Module One LLC & Co. KG
Mulaosmanovic Halid
GlobalFoundries Dresden Module One LLC & Co. KG
Beyer Sven
GlobalFoundries Dresden Module One LLC & Co. KG
Meyer Moritz Andreas
GlobalFoundries Dresden Module One LLC & Co. KG
DOI
https://doi.org/10.1051/bioconf/202412924036
Journal volume & issue
Vol. 129
p. 24036
Abstract
Read online
No abstracts available.
Keywords
dpc
stem
fefet
logic states
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