Parameter Identification for Nonlinear Circuit Models of Power BAW Resonator

Abstract

The large signal operation of the bulk acoustic wave (BAW) resonators is characterized by the amplitude-frequency effect and the intermodulation effect. The measurement of these effects, together with that of the small signal frequency characteristic, are used in this paper for the parameter identification of the nonlinear circuit models developed previously by authors. As the resonator has been connected to the measurement bench by wire bonding, the parasitic elements of this connection have been taken into account, being estimated solving some electrical and magnetic field problems.

Keywords

• BAW resonators and filters
• radiofrequency microelectromechanical systems
• radio tranceivers
• radiofrequency integrated circuits
• circuits for communications