Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki (Jun 2019)
TECHNOLOGICAL TECHNIQUES OF Al-Al<sub>2</sub>O<sub>3</sub> MICROSTRUCTURES FORMATION FOR POWERFUL ELECTROMECHANICAL SYSTEMS
Abstract
Thus, Al-Al2O3 structures characteristic features of which are the considerable height (300 - 450 μm ) of contact pads and conducting lines, the high thickness (150 - 600 μm ) of insulating anodic alumina with high breakdown voltages between the contact pads (up to 8 kV) were made in the present work. Such structures may be used in power electromechanical systems. Methods of the high-speed anodization, of the deep anodization and chemical etching were investigated to provide practically vertical walls in the Al-Al2O3 system.
