ORIGIN AND GROWTH KINETICS OF DENSE ANODIC ALUMINA

Abstract

Grounds for the research presented and the technique for the recording of kinetic (polarization) dependencies of the initial (from -2 V) stage of the origin and growth of dense anodic alumina are discussed. An influence of the starting aluminum surface on the kinetics of the initial stage was determined. The detailed analysis of various kinetic stages was made. Measurement results of the speci-fic capacity and its variation during the oxide film growth are submitted.

Keywords

• плотный оксид
• анодирование
• алюминий
• микроэлектроника