Proceedings (Nov 2018)

3D-Printed MEMS Magnetometer Featuring Compliant Mechanism

  • Matthias Kahr,
  • Harald Steiner,
  • Wilfried Hortschitz,
  • Michael Stifter,
  • Andreas Kainz,
  • Franz Keplinger

DOI
https://doi.org/10.3390/proceedings2130784
Journal volume & issue
Vol. 2, no. 13
p. 784

Abstract

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This paper reports a novel 3D-printed MEMS resonant magnetometer with optical readout which features a mechanical conversion of a vertical oscillation into a horizontal one. This demonstrates the advantages of 3D-printing technology in terms of rapid prototyping, low costs and fast product development cycles. In addition, 3D-printing enables ‘true’ three-dimensional MEMS structures in contrast to the traditional MEMS technology which allows only two dimensional structures. The measurement approach comprises a hybrid implementation of an optical modulator, an LED and a photodetector.

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