Sub-50 nm optical imaging in ambient air with 10× objective lens enabled by hyper-hemi-microsphere

Guangxing Wu; Yan Zhou; Minghui Hong

doi:10.1038/s41377-023-01091-9

Light: Science & Applications (Feb 2023)

Sub-50 nm optical imaging in ambient air with 10× objective lens enabled by hyper-hemi-microsphere

Guangxing Wu,
Yan Zhou,
Minghui Hong

Affiliations

Guangxing Wu: Department of Electrical and Computer Engineering, National University of Singapore
Yan Zhou: Department of Electrical and Computer Engineering, National University of Singapore
Minghui Hong: Department of Electrical and Computer Engineering, National University of Singapore

DOI: https://doi.org/10.1038/s41377-023-01091-9
Journal volume & issue: Vol. 12, no. 1
pp. 1 – 11

Abstract

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The hyper-hemi-microsphere fabricated by FIB milling can resolve ~50 nm feature by only coupling with a 10× objective lens (NA = 0.3) in virtual imaging mode.

Published in Light: Science & Applications

ISSN: 2047-7538 (Online)
Publisher: Nature Publishing Group
Country of publisher: United Kingdom
LCC subjects: Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics; Science: Physics: Optics. Light
Website: https://www.nature.com/lsa/

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