Facile Construction of a Laser Scanning Optical Beam Induced Current Microscope

Abstract

We report on the design and construction of a laser scanning optical beam-induced current (OBIC) microscope by assembling cost-effective commercial optical and electronic hardware components and developing data acquisition and control software in LabVIEW. A preliminary OBIC image of a Si photodetector acquired by the developed microscope is presented to demonstrate its operational capability. The versatility of the design will allow for the construction of other scanning microscope modalities on the same platform.

Keywords

• Current measurement
• data acquisition
• failure analysis
• optical imaging
• microscopy
• semiconductor device testing