Highly Sensitive Inertial Micro-Switch for Achieving Adjustable Multi-Threshold Acceleration

Abstract

An inertial micro-switch with multi-threshold acceleration detection capability has been proposed, taking advantage of electromechanical coupling behavior. A mathematical model of electromechanical coupling behavior was established to display the dependence of highly sensitivity on pull-in characteristic and show the ability to detect threshold acceleration by controlling the voltage applied to the inertial micro-switch. The capability of sensitivity and detection that was described in mathematical model was implemented to occur at the inertial switch and showed agreement with that of a simulation. Inertia switches that were comprised of various microstructures with dimensions ranging 3.5 µm from 180 µm were manufactured by means of the micro-electro-mechanical system (MEMS) manufacturing process, and their functions were evaluated by a dropping system. The control method related to the manufacturing of inertial switches was obtained by analyzing the effect of the structural parameters of the inertial switch on threshold voltage and threshold acceleration, resulting in a relatively small error between simulation and experiment. The inertial micro-switch showed high sensitivity to achieving the pull-in effect at 30 V, sense multi-threshold acceleration ranging from 500 g to 2000 g in 2.46 ms and provided enough time for outputting the acceleration signal. Furthermore, the multi-threshold acceleration can be adjusted by controlling the voltage applied to inertial micro-switches. In addition, other functions of inertial micro-switches, such as lower residual stress, high recoverability, and repeatability, have been displayed.

Keywords

• inertial micro-switch
• multi-threshold acceleration
• pull-in characteristic
• manufacturing process
• sensitivity