EPJ Web of Conferences (Jan 2024)

Infrared and conductive properties of TCO films deposited by magnetron sputtering at different temperatures

  • Di Napoli Annalisa,
  • Gaudino Eliana,
  • Strazzullo Paolo,
  • Farooq Umar,
  • Musto Marilena,
  • De Luca Daniela,
  • Krammer Anna,
  • Schueler Andreas,
  • De Gennaro Emiliano,
  • Russo Roberto

DOI
https://doi.org/10.1051/epjconf/202430909005
Journal volume & issue
Vol. 309
p. 09005

Abstract

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Low-emissive Transparent Conductive Oxide (TCO) coatings, such as Indium Tin Oxide (ITO) films, can be used to reduce radiative losses that affect Hybrid photovoltaic-thermal (PV-T) devices. This work shows the optical properties of ITO deposited by magnetron sputtering on a glass substrate with and without thermal heat treatment at different temperatures. All the analyses conducted include UV-VIS and infrared regions, up to 20 μm.