Bending characteristics of radio frequency microelectromechanical system low‐pass filter based on flexible substrate

Abstract

Abstract The aim of this paper is to investigate the bending characteristics of a low‐pass RF MEMS (radio frequency microelectromechanical system) filter based on a flexible substrate. The proposed filter is achieved by complementary split ring resonator and MEMS bridge which are fabricated on a flexible LCP (liquid crystal polymer) substrate. The bending characteristics of the filter are revealed by theory, simulation and measurement. The experimental results demonstrate that the return loss of the filter deteriorates and the cut‐off frequency of the filter decreases with the curvature of the flexible substrate increasing. The cut‐off frequency is 38.5 GHz and the return loss is −22.7 dB at 10 GHz with the flat substrate. When the curvature of the substrate increases to 28.57 m–1, the cut‐off frequency decreases to 14.8 GHz, and the return loss deteriorates to −5.7 dB at 10 GHz.

Keywords

• Passive filters and other passive networks
• Waveguide and microwave transmission line components
• Design and modelling of MEMS and NEMS devices