Quasi-Optical Four-Port Acoustic Filters Based on NEMS Coupled Beam Arrays

Abstract

Theoretical models are presented for quasi-optical four-port acoustic devices based on NEMS-coupled beam arrays. Analogies with coupled mode devices in microwaves, ultrasonics, optics, and electron wave optics are first reviewed, together with coupled beam filters. Power transfer between two mechanically coupled, electrostatically driven, coupled beam arrays is then demonstrated using a lumped element model, and the conditions for full power transfer are established. Four-port devices, including directional couplers and coupler filters with complementary transmission ports, are then demonstrated. Predictions are verified for realistic device layouts using the stiffness matrix method.

Keywords

• MEMS
• NEMS
• directional coupler
• directional coupler filter