Mechanical dicing of optical quality facets and waveguides in a silicon nitride platform

Abstract

Abstract The authors report a ductile dicing process for manufacturing optical‐quality facets in a multi‐layered silicon nitride platform without the need for polishing. A surface roughness (Sa) of 1.5 nm was achieved. This technique was extended to fabricate ridge waveguides, and the results and characterization are reported.

Keywords

• micromachining
• optical fabrication
• photonics
• sawing machines
• surface roughness
• waveguides