Low-Temperature Nitrogen Doping of Nanocrystalline Graphene Films with Tunable Pyridinic‑N and Pyrrolic‑N by Cold-Wall Plasma-Assisted Chemical Vapor Deposition
Nur Hamizah Zainal Ariffin,
Muhammad Aniq Shazni Mohammad Haniff,
Mohd Ismahadi Syono,
Mohd Ambri Mohamed,
Azrul Azlan Hamzah,
Abdul Manaf Hashim
Affiliations
Nur Hamizah Zainal Ariffin
Advanced Devices and Material Engineering Research Lab, Department of Electronic Systems Engineering, Malaysia-Japan International Institute of Technology, Universiti Teknologi Malaysia, Kuala Lumpur, Malaysia
Muhammad Aniq Shazni Mohammad Haniff
Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Malaysia
Mohd Ismahadi Syono
Advanced Devices Lab, MIMOS Berhad, Kuala Lumpur, Malaysia
Mohd Ambri Mohamed
Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Malaysia
Azrul Azlan Hamzah
Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Malaysia
Abdul Manaf Hashim
Advanced Devices and Material Engineering Research Lab, Department of Electronic Systems Engineering, Malaysia-Japan International Institute of Technology, Universiti Teknologi Malaysia, Kuala Lumpur, Malaysia