A Dual-Inlet Pump with a Simple Valves System

Abstract

To ameliorate the deficient output flow performance of the piezoelectric pumps with cantilever valves, a dual-inlet pump with a simple valves system is proposed. On the basis of explaining the structure design of the prototype, the working principle of the prototype is explained, and the output flow is theoretically analyzed. Then, the manufacturing process of the prototype is introduced. The general operating frequency of the pump was obtained by combining the finite element analysis of the piezoelectric actuator under dry and wet modes with the mechanical vibration test, and a series of measured flow rates were compared and improved through valve stiffness optimization and pump chamber height adjustment in the subsequent control experiment. The proposed piezoelectric pump achieves a maximum flow rate of 33.18 mL/min at a 180 Vp-p voltage with the driving frequency of 100 Hz, which may bring new inspiration for the application of small intelligent pumps in the field of microfluidics.

Keywords

• piezoelectric pump
• output flow performance
• cantilever valve
• stiffness optimization
• microfluidic