Fabrication of Low Cost Surface Acoustic Wave Sensors Using Direct Printing by Aerosol Inkjet

Abstract

Advancements in additive manufacturing techniques, printed electronics, and nanomaterials have made it possible for the cost-effective fabrication of sensors and systems. Low-cost sensors for continuous and real time monitoring of physical and chemical parameters will directly impact the energy-efficiency, safety, and manufacturing challenges of diverse technology sectors. In this paper, we present the design, printing, and characterization of a two-port surface acoustic wave (SAW) integrated on LiNbO3 substrate. The aerosol jet printer was used for direct-writing of interdigitated transducers for SAW devices with center frequency in the range of 40-87 MHz. The linear response of a temperature sensor based on the SAW design shows promise for direct-writing of environmental sensors on low-temperature substrates.

Keywords

• Additive manufacturing
• aerosol inkjet
• printed electronics
• sensors
• surface acoustic wave (SAW)