Spatial modulation of nanopattern dimensions by combining interference lithography and grayscale-patterned secondary exposure

Zhuofei Gan; Hongtao Feng; Liyang Chen; Siyi Min; Chuwei Liang; Menghong Xu; Zijie Jiang; Zhao Sun; Chuying Sun; Dehu Cui; Wen-Di Li

doi:10.1038/s41377-022-00774-z

Light: Science & Applications (Apr 2022)

Spatial modulation of nanopattern dimensions by combining interference lithography and grayscale-patterned secondary exposure

Zhuofei Gan,
Hongtao Feng,
Liyang Chen,
Siyi Min,
Chuwei Liang,
Menghong Xu,
Zijie Jiang,
Zhao Sun,
Chuying Sun,
Dehu Cui,
Wen-Di Li

Affiliations

Zhuofei Gan: Department of Mechanical Engineering, University of Hong Kong
Hongtao Feng: Department of Mechanical Engineering, University of Hong Kong
Liyang Chen: Department of Mechanical Engineering, University of Hong Kong
Siyi Min: Department of Mechanical Engineering, University of Hong Kong
Chuwei Liang: Department of Mechanical Engineering, University of Hong Kong
Menghong Xu: Department of Mechanical Engineering, University of Hong Kong
Zijie Jiang: Department of Mechanical Engineering, University of Hong Kong
Zhao Sun: Department of Mechanical Engineering, University of Hong Kong
Chuying Sun: Department of Mechanical Engineering, University of Hong Kong
Dehu Cui: School of Microelectronics, Southern University of Science and Technology
Wen-Di Li: Department of Mechanical Engineering, University of Hong Kong

DOI: https://doi.org/10.1038/s41377-022-00774-z
Journal volume & issue: Vol. 11, no. 1
pp. 1 – 10

Abstract

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Wafer-scale fabrication of periodic nanostructures with spatially modulated feature sizes is achieved by combining interference lithography and grayscale-patterned secondary exposure, opening new pathways toward large-area nanophotonic devices.

Published in Light: Science & Applications

ISSN: 2047-7538 (Online)
Publisher: Nature Publishing Group
Country of publisher: United Kingdom
LCC subjects: Technology: Engineering (General). Civil engineering (General): Applied optics. Photonics; Science: Physics: Optics. Light
Website: https://www.nature.com/lsa/

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