Gas Sensors Based on Individual (Ga, In)2O3 Nanowires

Abstract

In this work the growth and characterisation of (Ga, In)2O3 NWs inside a CVD furnace using different mixtures of Ga2O3 and In2O3 is reported. The NWs have been characterised by SEM, XRD and TEM, proving their cubic crystalline nature similar to In2O3 and the degree of incorporation of Ga in this lattice. Furthermore, gas nanosensors based on single NWs have been fabricated and measured, demonstrating the sensing properties of the synthesized material.

Keywords

• gas sensor
• nanowires
• (Ga
• In)2O3
• new material