Bonding States of Hydrogen in Plasma-Deposited Hydrocarbon Films

Abstract

We applied temperature-programmed desorption (TPD) spectroscopy to study the bonding of hydrogen in amorphous hydrogenated carbon (a−C:H) films. Typical hard plasma-deposited a−C:H films with an initial hydrogen content (H/(H+C)) of about 30% were used as samples. About 85% of the initial hydrogen content is released in the form of H2, the rest in the form of hydrocarbons. Using a temperature ramp of 15 K/min, release of hydrogen starts at about 600 K with a first peak at about 875 K and a broad shoulder around 1050 K. The peak positions depend on the temperature ramp. This fact was exploited to determine the pre-exponential factor for an analytic analysis of the release spectra. This analysis revealed a pre-exponential factor of ν = 1 × 10 16 1/s, which deviates significantly from the frequently assumed prefactor 1 × 10 13 1/s. This higher prefactor leads to a shift in the determined binding energies by about +0.5 eV. Standard TPD measurements with linear temperature ramps up to 1275 K were complemented by so-called “ramp and hold” experiments with linear ramps up to certain intermediate temperatures and holding the samples for different times at these temperatures. Such experiments provide valuable additional data for investigation of the thermal behavior of the investigated films. Our experiments prove that the width of the hydrogen release spectrum is determined by a distribution of binding energies rather than release kinetics or diffusive effects. This binding energy distribution has a peak at about 3.1 eV and a shoulder at higher energies extending from about 3.6 to 3.9 eV.

Keywords

• thermal desorption spectroscopy
• amorphous hydrocarbon film
• inverse problem
• bayesian inference