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ACS Omega
(Oct 2019)
Direct Synthesis of Large-Scale Multilayer TaSe2 on SiO2/Si Using Ion Beam Technology
Hsu-Sheng Tsai,
Fan-Wei Liu,
Jhe-Wei Liou,
Chong-Chi Chi,
Shin-Yi Tang,
Changan Wang,
Hao Ouyang,
Yu-Lun Chueh,
Chaoming Liu,
Shengqiang Zhou,
Wei-Yen Woon
Affiliations
Hsu-Sheng Tsai
Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany
Fan-Wei Liu
Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.
Jhe-Wei Liou
Department of Physics, National Central University, Taoyuan, Taiwan, R. O. C.
Chong-Chi Chi
Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.
Shin-Yi Tang
Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.
Changan Wang
Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany
Hao Ouyang
Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.
Yu-Lun Chueh
Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.
Chaoming Liu
Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany
Shengqiang Zhou
Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany
Wei-Yen Woon
Department of Physics, National Central University, Taoyuan, Taiwan, R. O. C.
DOI
https://doi.org/10.1021/acsomega.9b02441
Journal volume & issue
Vol. 4, no. 17
pp. 17536 – 17541
Abstract
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