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Measurement Science Review
(Jan 2010)
Measurement of nanopatterned surfaces by real and reciprocal space techniques
Siffalovic P.,
Vegso K.,
Jergel M.,
Majkova E.,
Keckes J.,
Maier G.,
Cornejo M.,
Ziberi B.,
Frost F.,
Hasse B.,
Wiesmann J.
Affiliations
Siffalovic P.
Institute of Physics SAS, Dubravska cesta 9, 84511 Bratislava, Slovakia
Vegso K.
Institute of Physics SAS, Dubravska cesta 9, 84511 Bratislava, Slovakia
Jergel M.
Institute of Physics SAS, Dubravska cesta 9, 84511 Bratislava, Slovakia
Majkova E.
Institute of Physics SAS, Dubravska cesta 9, 84511 Bratislava, Slovakia
Keckes J.
Erich Schmid Institute for Materials Science, Jahnstr. 12, A-8700 Leoben, Austria
Maier G.
Materials Center Leoben Forschung GmbH, Roseggerstr. 12, A-8700 Leoben, Austria
Cornejo M.
Leibniz-Institut für Oberflächenmodifizierung e. V., 04318 Leipzig, Germany
Ziberi B.
Leibniz-Institut für Oberflächenmodifizierung e. V., 04318 Leipzig, Germany
Frost F.
Leibniz-Institut für Oberflächenmodifizierung e. V., 04318 Leipzig, Germany
Hasse B.
Incoatec GmbH, Max-Planck-Str. 2, 21502 Geesthacht, Germany
Wiesmann J.
Incoatec GmbH, Max-Planck-Str. 2, 21502 Geesthacht, Germany
DOI
https://doi.org/10.2478/v10048-010-0027-1
Journal volume & issue
Vol. 10, no. 5
pp. 153 – 156
Abstract
Read online
No abstracts available.
Keywords
afm
gisaxs
nanostructures
ion-beam sputtering
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