Low-threshold wavelength-tunable ultraviolet vertical-cavity surface-emitting lasers from 376 to 409 nm

Yang Mei; Tian-Rui Yang; Wei Ou; Zhong-Ming Zheng; Hao Long; Lei-Ying Ying; Bao-Ping Zhang

Fundamental Research (Nov 2021)

Low-threshold wavelength-tunable ultraviolet vertical-cavity surface-emitting lasers from 376 to 409 nm

Yang Mei,
Tian-Rui Yang,
Wei Ou,
Zhong-Ming Zheng,
Hao Long,
Lei-Ying Ying,
Bao-Ping Zhang

Affiliations

Yang Mei: Department of Microelectronics and Integrated Circuits, Laboratory of Micro/Nano-Optoelectronics, School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China
Tian-Rui Yang: Department of Microelectronics and Integrated Circuits, Laboratory of Micro/Nano-Optoelectronics, School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China
Wei Ou: Department of Microelectronics and Integrated Circuits, Laboratory of Micro/Nano-Optoelectronics, School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China
Zhong-Ming Zheng: Department of Microelectronics and Integrated Circuits, Laboratory of Micro/Nano-Optoelectronics, School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China
Hao Long: Department of Microelectronics and Integrated Circuits, Laboratory of Micro/Nano-Optoelectronics, School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China
Lei-Ying Ying: Department of Microelectronics and Integrated Circuits, Laboratory of Micro/Nano-Optoelectronics, School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China
Bao-Ping Zhang: Corresponding author.; Department of Microelectronics and Integrated Circuits, Laboratory of Micro/Nano-Optoelectronics, School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China

Journal volume & issue: Vol. 1, no. 6
pp. 684 – 690

Abstract

Read online

Optically pumped wavelength-tunable vertical-cavity surface-emitting lasers (VCSELs) operating in the ultraviolet A (UVA) spectrum were demonstrated. The VCSELs feature double dielectric distributed brag reflectors and a wedge-shaped cavity fabricated using the substrate transfer technique and laser lift off, resulting in a graded cavity length in one device. A resonant period gain structure is used in the InGaN/GaN multi-quantum well active region to enhance the coupling between the cavity mode field and the active layers. The optical field inside the cavity is modulated by the cavity length; thus, tunable lasing at different wavelengths is realized at different points of a single VCSEL chip. The lasing wavelength extends from 376 to 409 nm, covering most of the UVA band below the band gap of GaN. The threshold pumping power density of the UVA VCSELs at different wavelengths ranges from 383 to 466 kW/cm2, which is among the lowest values for ultraviolet (UV) VCSELs. This study is promising for the development of small-footprint, power-efficient UV light sources.

Published in Fundamental Research

ISSN: 2667-3258 (Online)
Publisher: KeAi Communications Co. Ltd.
Country of publisher: China
LCC subjects: Science: Science (General)
Website: https://www.keaipublishing.com/en/journals/fundamental-research/

About the journal

Abstract

Keywords