Journal of Advanced Mechanical Design, Systems, and Manufacturing (Mar 2013)

Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems

  • Kenji SUITA,
  • Motoaki HARA,
  • Shinya ISHIKAWA,
  • Katsuhiro TANAKA,
  • Sumito NAGASAWA,
  • Hiroki KUWANO

DOI
https://doi.org/10.1299/jamdsm.7.95
Journal volume & issue
Vol. 7, no. 2
pp. 95 – 102

Abstract

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This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.

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