Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD Reactor

• Lipei Peng,
• Han Dong,
• Shaobo Li,
• Zhanwei Wang,
• Xiangjun Meng,
• Yafeng Wang,
• Tengshi Liu,
• Xiangyu Li,
• Jialiang Ji

Affiliations

Lipei Peng

School of Materials Science and Engineering, Shanghai University, Shanghai, China

Han Dong

School of Materials Science and Engineering, Shanghai University, Shanghai, China

Shaobo Li

PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China

Zhanwei Wang

PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China

Xiangjun Meng

PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China

Yafeng Wang

PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China

Tengshi Liu

PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China

Xiangyu Li

PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China

Jialiang Ji

PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China