Kinetics of Fragmentation During Annealing in Vacuum of Titanium Nanofilms Deposited Onto Non-Metallic Materials

Abstract

The results are presented of the study of kinetics of fragmentation of titanium nanofilms 100 nm thick deposited onto the surface of samples made from single crystals of Al2O3(leucosapphire), ZrO2, SiC, and AlN ceramics and annealed in vacuum at temperatures 1300 16000C with different exposition times at each temperature within 2 - 20 min range. Keywords: kinetics, fragmentation, titanium nanofilm, single crystal, leucosapphire, ceramics.