MEMS and NEMS - micro (and nano) electromechanical systems

Abstract

MEMS and NEMS use and application is growing and their market is expanding. With the development of 5G and IoT technologies the number of MEMS components is always increasing.In this paper an introduction to MEMS/NEMS definition, categories, and advantages. Fabrication techniques of MEMS/NEMS are discussed. Finally, an elaborative analysis of the different applications of MEMS/NEMS, followed by a discussion of the future of Micro / Nano electromechanical Systems.

Keywords

• mems
• nems
• micro electromechanical systems
• nano electromechanical systems