Structure Optimization of Planar Nanoscale Vacuum Channel Transistor

Ji Xu; Congyuan Lin; Yu Li; Xueliang Zhao; Yongjiao Shi; Xiaobing Zhang

doi:10.3390/mi14020488

Micromachines (Feb 2023)

Structure Optimization of Planar Nanoscale Vacuum Channel Transistor

Ji Xu,
Congyuan Lin,
Yu Li,
Xueliang Zhao,
Yongjiao Shi,
Xiaobing Zhang

Affiliations

Ji Xu: School of Electronic and Information Engineering, Nanjing University of Information Science and Technology, Nanjing 210044, China
Congyuan Lin: School of Electronic and Information Engineering, Nanjing University of Information Science and Technology, Nanjing 210044, China
Yu Li: School of Electronic and Information Engineering, Nanjing University of Information Science and Technology, Nanjing 210044, China
Xueliang Zhao: School of Electronic and Information Engineering, Nanjing University of Information Science and Technology, Nanjing 210044, China
Yongjiao Shi: Joint International Research Laboratory of Information Display and Visualization, School of Electronic Science and Engineering, Southeast University, Nanjing 210096, China
Xiaobing Zhang: Joint International Research Laboratory of Information Display and Visualization, School of Electronic Science and Engineering, Southeast University, Nanjing 210096, China

DOI: https://doi.org/10.3390/mi14020488
Journal volume & issue: Vol. 14, no. 2
p. 488

Abstract

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Due to its unique structure, discoveries in nanoscale vacuum channel transistors (NVCTs) have demonstrated novel vacuum nanoelectronics. In this paper, the structural parameters of planar-type NVCTs were simulated, which illustrated the influence of emitter tip morphology on emission performance. Based on simulations, we successfully fabricated back-gate and side-gate NVCTs, respectively. Furthermore, the electric properties of NVCTs were investigated, showing the potential to realize the high integration of vacuum transistors.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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