Ring Resonator Gap Determination Design Rule and Parameter Extraction Method for Sub-GHz Resolution Whole C-Band Si₃N₄ Integrated Spectrometer

Abstract

A panoramic ultra-high resolution photonic integrated circuit spectrometer is under development by the authors. The architecture comprises a tunable ring resonator (RR) stage and an AWG stage. The resolution defines the bandwidth of the RR, determined by the cross-coupled power and hence the gap between the access and ring waveguides. The AWG channel frequency spacing determines the required free-spectral range (FSR) and hence the perimeter of the ring resonator. The specified 3N4 platform. The parameter extraction method is used to analyze the measured characterization data of the ring resonators. The results show good agreement within ~43 nm between the design rule and the gaps size determined by the parameters extracted from the measured data and provide experimental confirmation of the technological viability of the ring resonators required by the spectrometer.

Keywords

• gap determination
• parameter extraction
• ring resonator
• Si₃N₄ integrated spectrometer