Dual-Point Technique for Multi-Trap RTN Signal Extraction

Abstract

Random telegraph noise (RTN), as one dominant variation source in the ultra-scaled devices, has been attracting much more attention, and its analysis is of great importance to understand the fundamental physical mechanisms. In this work, with the advanced dual-point method, we successfully separate the impacts of each trap in multi-traps correlated RTN, especially for complex anomalous RTN signals. A four-level transfer curve and VG-dependent RTN magnitude are extracted in a two-trap transistor from the sub-threshold region to the linear region. Furthermore, current degradations contributed from each trap of three- and four-level RTN signals are identified and distinguished. The proposed method can be utilized to evaluate multiple traps RTN and explore the underlying physics.

Keywords

• Noise measurement
• transistors
• high-K gate dielectrics