Desorption and Electrical Conductivity Studies of Indium Tin Oxide Powders and Thick Films

Abstract

The influence of various gas compositions on surface adsorbate species and electrical conductivity of indium tin oxide (ITO) powders and thick films was studied. By combining results of temperature dependent desorption (TPD) with electrical conductivity measurements it was shown that, after exposure to ambient air, the surfaces of both powders and films are covered with significant amounts of oxygen, water and carbon related species. While the influence of oxygen adsorbates has already been described for temperatures below 500 °C, desorption of some of these species could be detected at temperatures as high as 675 °C, with a significant influence on electrical film conductivity.

Keywords

• gas sensor
• indium tin oxide
• desorption