Analysis for an Improved Nanomechanical Microcantilever Sensor on Optical Waveguides

Yachao Jing; Guofang Fan; Rongwei Wang; Zeping Zhang; Muguang Wang; Xiaoyu Cai; Jiasi Wei; Xin Chen; Hongyu Li; Yuan Li

doi:10.1109/ACCESS.2020.2984058

IEEE Access (Jan 2020)

Analysis for an Improved Nanomechanical Microcantilever Sensor on Optical Waveguides

Yachao Jing,
Guofang Fan,
Rongwei Wang,
Zeping Zhang,
Muguang Wang,
Xiaoyu Cai,
Jiasi Wei,
Xin Chen,
Hongyu Li,
Yuan Li

Affiliations

Yachao Jing: ORCiD; Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China
Guofang Fan: Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China
Rongwei Wang: Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China
Zeping Zhang: Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China
Muguang Wang: ORCiD; Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing, China
Xiaoyu Cai: National Center of Testing Technology, National Center of Measurement and Testing for East China, Shanghai Institute of Measurement and Testing Technology, Shanghai, China
Jiasi Wei: National Center of Testing Technology, National Center of Measurement and Testing for East China, Shanghai Institute of Measurement and Testing Technology, Shanghai, China
Xin Chen: Department of Instrument Science and Engineering, Shanghai Jiao Tong University, Shanghai, China
Hongyu Li: College of Mechanical and Electronic Engineering, Shandong University of Science and Technology, Qingdao, China
Yuan Li: National Center of Testing Technology, National Center of Measurement and Testing for East China, Shanghai Institute of Measurement and Testing Technology, Shanghai, China

DOI: https://doi.org/10.1109/ACCESS.2020.2984058
Journal volume & issue: Vol. 8
pp. 63856 – 63861

Abstract

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An analysis model for an optical waveguide microcantilever sensor is developed combining the optical and mechanical models. An improved optical waveguide microcantilever sensor with a buffer is provided and taken as an example to explore using the analysis model. A systematic and detailed discussion about the couplers for the input waveguide to optical waveguide cantilever and the optical waveguide cantilever to the output waveguide of the improved waveguide cantilever sensor is presented. The sensitivity of an improved optical waveguide cantilever sensor is evaluated by analyzing the input/output waveguide, buffer, microcantilever, and gap. An improved optical waveguide microcantilever sensor by adding a buffer shows a sensitivity of 5.7 × 10-4nm-1, which is improved by 51.3%, compared with a conventional optical waveguide microcantilever sensor. The design of an optical waveguide cantilever sensor is a trade-off of different design parameters. These will be helpful for the study of an optical waveguide cantilever sensor.

Published in IEEE Access

ISSN: 2169-3536 (Online)
Publisher: IEEE
Country of publisher: United States
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering
Website: https://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=6287639

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