Deposition of Coatings of Tungsten and Two-Layer Copper-Tungsten Composition

Abstract

In the work a technology of tungsten films and two-layer copper-tungsten coatings deposition on stainless steel substrates was developed. The coatings were deposited by magnetron and arc sputtering of materials with condensation of them on the testing substrates. The deposition objects were probe of the ICRF antenna on fusion devices and reference samples, on which the properties of obtained coatings were studied. The possibility of tungsten coatings forming on long-length elements of functional blocs was considered.

Keywords

• sputtering systems
• multilayer coatings
• tungsten films
• copper films
• adhesion