Piezoelectric Linear Motors with Alternating Action for Motion Servo System of Probe Station

Abstract

The development of a piezoelectric linear motor is presented in this paper, based on the principle of alternating motion, to meet the acting stroke and accuracy requirements for the probe station’s motion servo system. By partitioning the stator into tangential and normal components, two tangential actuators are affixed to the base, while two normal actuators are fixed on the preloading mechanism, thereby proposing a novel approach for connecting the stator and base. First, the construction and the working principle of the motor were introduced. Subsequently, the motor’s major components were designed through finite element simulation, followed by modeling the motor dynamics and deriving its displacement transfer function. Finally, an experimental prototype was fabricated, and a prototype test system was constructed. The driving method can realize a large stroke operation at a low frequency. The minimum operating frequency of the motor is 1 Hz, the minimum step is 12.55 μm, and the stroke is 105 mm. The study results will promote the development of high-performance probe systems.

Keywords

• probe station
• piezoelectric linear motor
• alternating action