High Quality Factor Silicon Membrane Metasurface for Intensity-Based Refractive Index Sensing

Abstract

We propose a new sensing device based on all-optical nano-objects placed in a suspended periodic array. We demonstrate that the intensity-based sensing mechanism can measure environment refractive index change of the order of 1.8×10−6, which is close to record efficiencies in plasmonic devices.

Keywords

• sensing
• metasurface
• BIC