Remote Photothermal Actuation for Calibration of In-Phase and Quadrature Readout in a Mechanically Amplified Fabry–Pérot Accelerometer

Abstract

A mechanically amplified Fabry-Pérot optical accelerometer is reported in which photothermal actuation is used to calibrate the in-phase and quadrature (I&Q) readout. The Fabry-Pérot interferometer (FPI) is formed between a gold-coated silicon mirror, situated in the middle of a V-beam amplifier, and the end surface of a cleaved optical fiber. On the opposite side of the silicon mirror, a further cleaved optical fiber transmits near-infrared laser light (λ = 785 nm), which is absorbed by the uncoated silicon causing heating. The thermal expansion of the V-beam is translated into an amplified change in cavity length of the FPI, large enough for the 2π-phase variation necessary for I&Q calibration. A simple 1D thermal analysis of the structure has been developed to predict the relationship between laser power and change in cavity length. A device having a V-beam of length 1.8 mm, width 20 μm, and angle 2 ° was found to undergo a cavity length change of 785 nm at 30 mW input power. The device response was approximately linear for input accelerations from 0.01 to 15 g. The noise was measured to be ~ 60 μg/√Hz from 100 Hz to 3.0 kHz, whereas the limit of detection was 47.7 mg from dc to 3.0 kHz.

Keywords

• Micro-optics
• sensors
• lasers
• MEMS
• optical devices
• thermal actuation and Fabry–Pérot