High-Sensitivity MEMS Shear Probe for Autonomous Profiling Observation of Marine Turbulence

Renxin Wang; Qingyu Qiao; Shasha Yang; Xiangzheng Kong; Guochang Liu; Xu Chen; Hua Yang; Dalei Song; Licheng Jia; Jiangong Cui; Changde He; Yuhua Yang; Guojun Zhang; Chenyang Xue; Wendong Zhang

doi:10.3390/rs14195004

Remote Sensing (Oct 2022)

High-Sensitivity MEMS Shear Probe for Autonomous Profiling Observation of Marine Turbulence

Renxin Wang,
Qingyu Qiao,
Shasha Yang,
Xiangzheng Kong,
Guochang Liu,
Xu Chen,
Hua Yang,
Dalei Song,
Licheng Jia,
Jiangong Cui,
Changde He,
Yuhua Yang,
Guojun Zhang,
Chenyang Xue,
Wendong Zhang

Affiliations

Renxin Wang: State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China
Qingyu Qiao: State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China
Shasha Yang: State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China
Xiangzheng Kong: State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China
Guochang Liu: State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China
Xu Chen: Department of Oceanography, College of Oceanic and Atmospheric Sciences, Ocean University of China, Qingdao 266000, China
Hua Yang: Department of Electronic Engineering, College of Information Science and Engineering, Ocean University of China, Qingdao 266000, China
Dalei Song: Department of Automation and Measurement, College of Engineering, Ocean University of China, Qingdao 266000, China
Licheng Jia: State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China
Jiangong Cui: State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China
Changde He: State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China
Yuhua Yang: State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China
Guojun Zhang: State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China
Chenyang Xue: State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China
Wendong Zhang: State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051, China

DOI: https://doi.org/10.3390/rs14195004
Journal volume & issue: Vol. 14, no. 19
p. 5004

Abstract

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Autonomous profiling observation of full-depth marine turbulence is very important for ocean research. Anisotropic turbulence near the boundary layer needs to be observed well. However, there is lack of high-spatial-resolution and high-sensitivity methods to fulfill vector turbulence observation. Hence, a highly sensitive bullet-headed MEMS shear probe for observing ocean vector turbulence is developed in this manuscript. The sensing mechanism, design and fabrication are demonstrated in detail. In order to meet the bandwidth requirements for observing ocean turbulence, we perform wet-mode simulations of probe structure to achieve an eigenfrequency of 490 Hz. Through sensitivity calibration experiments, it achieves a sensitivity of 4.84 × 10−2 V·m·s2/kg, which is much higher than those of shear probes reported previously. In addition, the vector test validates that the probe can measure ocean vector turbulence. The results show that the proposed probe is promising in autonomous profiling observation of marine turbulence.

Published in Remote Sensing

ISSN: 2072-4292 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Science
Website: http://www.mdpi.com/journal/remotesensing/

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